Aiming at the damage of a Iow-range micro-electro-mechanical system(MEMS) acceleration sensor under tens of thousands of

g

n

overload during the measurement of outer ballistic information of conventional weapons and ammunition

a kind of shrimp claw anti-impact micro-acceleration sensor was proposed

which could realize the index requirements of anti-overload 30 000

g

n

and range 50

g

n

. The finite element simulation results show that the displacement of the sensor is 0. 99 μm and the sensitivity is 0

.124 pF/

g

n

under 50

g

n

load. The maximum equivalent stress of the acceleration sensor under 30 000

g

n

overload is reduced from 1 022.5 MPa to 84.326 MPa

which effectively improved the reliability of the sensor.