1. 中北大学电子测试技术国防科技重点实验室
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刘小柔, 赵锐, 石云波, 等. 仿桥梁护舷式抗高过载加速度传感器设计[J]. 机械强度, 2021,43(5):1149-1154.
LIU XiaoRou, ZHAO Rui, SHI YunBo, et al. NEW DESIGN OF A BRIDGE FENDER-LIKE ANTI-HIGH OVERLOADING ACCELEROMETER[J]. 2021,43(5):1149-1154.
刘小柔, 赵锐, 石云波, 等. 仿桥梁护舷式抗高过载加速度传感器设计[J]. 机械强度, 2021,43(5):1149-1154. DOI: 10.16579/j.issn.1001.9669.2021.05.018.
LIU XiaoRou, ZHAO Rui, SHI YunBo, et al. NEW DESIGN OF A BRIDGE FENDER-LIKE ANTI-HIGH OVERLOADING ACCELEROMETER[J]. 2021,43(5):1149-1154. DOI: 10.16579/j.issn.1001.9669.2021.05.018.
为了解决用于外弹道信息测量的MEMS加速度传感器无法承受弹丸发射过程中膛内的高过载,易产生器件损坏的问题,设计了一种具有抗高过载能力的低量程电容式加速度传感器。在传感器梁上应力较大、相对易受到撞击而产生断裂的端部位置设置了仿桥梁护舷式的防护台结构,该结构能以自身形变吸收部分撞击时的能量,从而减小传感器本身因撞击而产生的变形。有限元仿真结果表明:引入这种桥梁护舷式防护台的加速度传感器在30 000g过载情况下受到的应力由引入前的994.88 MPa降低至70 MPa,因过载导致器件损伤断裂的可能性大幅降低,符合提高传感器抗过载能力的设计预期。
In order to solve the problem that the MEMS accelerometer used the external ballistic information measurement cannot withstand the high overload during projectile launching and is easy to cause damage to the device,a low-range capacitive accelerometer with high overloading resistance was designed. Platforms modeled on the bridge fender structure were placed at the end of the beam where the stress was relatively large and easy to be broken by impact. The structure can absorb a part of the energy during an impact with its own deformation,thereby reducing the deformation of the sensor itself. The finite element simulation results indicated that the stress of the proposed accelerometer under the condition of 30 000 g overload was reduced from 994. 88 MPa to 70 MPa. Therefore,the possibility of device damage and fracture was greatly reduced,which meets the design expectations of improving the sensor’s anti-overload capability.
低量程抗过载加速度计防护结构微机电系统(MEMS)
Low rangeAnti-overloadAccelerometerProtective structureMicro-electro-mechanical systems(MEMS)
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