WANG XiaoBo, XIE RuiQing. RESEARCH ON THE RESIDUAL STRESS OF THE CRYSTAL SURFACE DURING LAPPING PROCESS BASED ON A SINGLE PARTICLE MODEL[J]. 2021,43(3):596-600.
WANG XiaoBo, XIE RuiQing. RESEARCH ON THE RESIDUAL STRESS OF THE CRYSTAL SURFACE DURING LAPPING PROCESS BASED ON A SINGLE PARTICLE MODEL[J]. 2021,43(3):596-600. DOI: 10.16579/j.issn.1001.9669.2021.03.013.
为了明确激光晶体材料研磨表面残余应力形成机制,以典型的激光晶体材料YAG晶体为研究对象,利用大型有限元软件Ansys,建立了晶体元件研磨加工过程的单颗粒作用模型,研究了YAG晶体材料的塑性特性,分析了研磨过程中磨粒机械作用对晶体表面残余应力分布的影响。结果表明,YAG晶体受单颗粒作用载荷18 m N时,晶体材料内部的残余应力主要表现为压应力(最大分布深度约3μm),但在工件表层(深度<150 nm)范围内为拉应力,且拉应力最大值超过材料拉伸极限强度,将诱导晶体表面形成微裂纹;当单颗粒载荷为2.3 m N时,晶体表面残余最大拉应力值小于材料拉伸极限强度,可以实现晶体材料塑性域加工去除。
Abstract
In order to understand the formation mechanism of the residual stress of the lapping surface of laser crystal,a single particle model of a YAG crystal workpiece during lapping process was established by the finite element analysis software ANSYS. The material plastic properties of YAG crystal were studied,and the influence of mechanical action of abrasive particles on the distribution of residual stress of crystal surface was analyzed. The result shows that the residual stress of the lapping surface of YAG crystal is mainly compressive stress( the maximum distribution depth is ≈ 3 μm) when the single particle load on the workpiece surface is 18 m N. However,there is tensile stress in the shallow surface layer( depth < 150 nm),and the maximum tensile stress exceeds the ultimate tensile strength of the material. The excessive tensile stress will induce microcracks on the crystal surface. When the single particle load is reduced to 2. 3 m N,the maximum residual tensile stress of the crystal surface is less than the ultimate tensile strength of the material,which can achieve the plastic processing of YAG crystal.
关键词
激光晶体研磨塑性特性残余应力有限元单颗粒
Keywords
Laser crystalLappingPlastic propertyResidual stressFinite element analysisSingle particle