WU YUXI, YANG YILING, WU GAOHUA, et al. MONOLITHIC PURE CENTER PIEZOELECTRIC ROTARY PLATFORM WITHOUT ACTUATOR REDUNDANCY. [J]. Journal of mechanical strength , 2024, 46(4): 846-852.
DOI:
WU YUXI, YANG YILING, WU GAOHUA, et al. MONOLITHIC PURE CENTER PIEZOELECTRIC ROTARY PLATFORM WITHOUT ACTUATOR REDUNDANCY. [J]. Journal of mechanical strength , 2024, 46(4): 846-852. DOI: 10.16579/j.issn.1001.9669.2024.04.012.
MONOLITHIC PURE CENTER PIEZOELECTRIC ROTARY PLATFORM WITHOUT ACTUATOR REDUNDANCY
In order to achieve high⁃precision and pure⁃center rotation motion in micro/nanomanipulation tasks
a monolithic pure⁃center rotation platform was designed using two⁃stage compliant amplification mechanisms and a single piezoelectric actuator.Compared with other platforms
the designed rotation platform exhibited the merits of no actuator redundancy
high natural frequency
large rotation angle
and compact structure.The static and dynamic models were established by combining the pseudo⁃rigid body and finite element methods.Also
the output angle
input stiffness
output stiffness
and natural frequency of the rotation platform were simulated by Ansys software.Finally
an experimental test system was built
and the performance of the platform was tested through several experiments.Also
the feedforward control was used to compensate for the piezoelectric hysteresis.The experimental results show that the rotation angle is 16.8 mrad
the natural frequency is 527.3 Hz
and the resolution is 0.3μrad.Meanwhile
the hysteresis nonlinearity is compensated effectively using feedforward control.Thus
the platform is capable the high precision center rotation operation.
关键词
压电驱动柔顺机构纯中心旋转大行程
Keywords
Piezoelectric actuatorCompliant mechanismPure center rotationLarge stroke