DESIGN OF ANTI-IMPАСТ MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW

ZHANG Xu; ZHAO Rui; SHI YunBo; ZU KaiXuan; ZHANG JieYu; YAN XiaoPeng

doi:10.16579/j.issn.1001.9669.2024.02.020

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DESIGN OF ANTI-IMPАСТ MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW

更新时间：2024-07-05

- DESIGN OF ANTI-IMPАСТ MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW
- Journal of Mechanical Strength Vol. 46, Issue 2, Pages: 410-415(2024)
- 作者机构：
  
  1. 中北大学电子测试技术国防科技重点实验室
  2. 山西北方机械制造有限责任公司
- 作者简介：
- 基金信息：
  
  The project supported by the Basic Research Project of Shanxi Province (No. 202103021224206), the National Natural Science Foundation of China (No.52175524), and the Shanxi Province "1331 Project"Key Discipline Construction Project.
- DOI：10.16579/j.issn.1001.9669.2024.02.020
  CLC： TH703
- Published：15 April 2024，
- 稿件说明：
移动端阅览
ZHANG Xu, ZHAO Rui, SHI YunBo, et al. DESIGN OF ANTI-IMPАСТ MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW. [J]. Journal of Mechanical Strength , 2024,46(2):410-415.
DOI：

ZHANG Xu, ZHAO Rui, SHI YunBo, et al. DESIGN OF ANTI-IMPАСТ MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW. [J]. Journal of Mechanical Strength , 2024,46(2):410-415. DOI： 10.16579/j.issn.1001.9669.2024.02.020.

摘要

针对外弹道信息测量过程中，低量程微机电系统（Micro-Electro-Mechanical Systems，MEMS）加速度传感器在上万

过载环境下的损坏问题，提出了一种仿虾螯式抗冲击微加速度传感器，可以实现抗过载30 000

量程50

的指标要求。有限元仿真结果表明，在50

载荷作用下，加速度计敏感单元位移为0.99 μm，灵敏度为0.124 pF/

；引入仿虾螯式抗冲击缓冲结构的加速度传感器在30 000

过载作用下承受的等效应力的最大值从1 022.5 MPa降低至84.326 MPa，有效地提高了该传感器件的可靠性。

Abstract

Aiming at the damage of a Iow-range micro-electro-mechanical system(MEMS) acceleration sensor under tens of thousands of

overload during the measurement of outer ballistic information of conventional weapons and ammunition

a kind of shrimp claw anti-impact micro-acceleration sensor was proposed

which could realize the index requirements of anti-overload 30 000

and range 50

. The finite element simulation results show that the displacement of the sensor is 0. 99 μm and the sensitivity is 0

.124 pF/

under 50

load. The maximum equivalent stress of the acceleration sensor under 30 000

overload is reduced from 1 022.5 MPa to 84.326 MPa

which effectively improved the reliability of the sensor.

关键词

加速度计抗冲击电容式低量程仿生缓冲结构微机电系统

Keywords

AccelerometerImpact resistanceCapacitiveLow rangeBionic cushioning structureMicro-electro-mechanical system

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