DESIGN OF ELASTIC RING CLAMPING STRUCTURE FOR PIEZOELECTRIC BENDING EFFECT

GAO ChangYin; WU XiaoLing

doi:10.16579/j.issn.1001.9669.2021.02.036

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DESIGN OF ELASTIC RING CLAMPING STRUCTURE FOR PIEZOELECTRIC BENDING EFFECT

更新时间：2022-09-22

- DESIGN OF ELASTIC RING CLAMPING STRUCTURE FOR PIEZOELECTRIC BENDING EFFECT
- Journal of Mechanical Strength Vol. 43, Issue 2, Pages: 494-498(2021)
- 作者机构：
  
  1. 郑州航空工业管理学院航空工程学院
  2. 郑州大学机械工程学院
- 作者简介：
- 基金信息：
- DOI：10.16579/j.issn.1001.9669.2021.02.036
  CLC：
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GAO ChangYin, WU XiaoLing. DESIGN OF ELASTIC RING CLAMPING STRUCTURE FOR PIEZOELECTRIC BENDING EFFECT. [J]. 43(2):494-498(2021)
DOI：

GAO ChangYin, WU XiaoLing. DESIGN OF ELASTIC RING CLAMPING STRUCTURE FOR PIEZOELECTRIC BENDING EFFECT. [J]. 43(2):494-498(2021) DOI： 10.16579/j.issn.1001.9669.2021.02.036.

摘要

为验证石英晶片弯曲效应,设计了弹性环晶片夹持结构。根据弹性力学和压电学推导石英晶片弯曲应力和极化强度计算公式,接着对设计的弹性环晶片夹持结构进行受力分析,为了减少结构变形对传感器使用影响,根据弹性力学能量原理推导出在载荷作用下该弹性环结构静刚度计算公式,并采用有限元方法进行强度和刚度校核。理论计算、有限元分析和实测均表明,该弹性环晶片夹持结构刚度> 10 kgf/um,满足传感器设计要求。该弹性环晶片夹持结构必将促进新型悬臂梁测力传感器和微执行器的研发。

Abstract

In order to verify the bending effect of quartz wafer,a special elastic ring clamping structure was designed to install and position the sensitive element. According to elastic mechanics and piezoelectricity,the calculation formula of bending stress and polarization of quartz wafer were deduced and the stress analysis of the elastic ring wafer clamping structure was carried out. In order to reduce the influence of structural deformation on sensor application performance,using the energy principle of elastic mechanics the static stiffness formula of the elastic ring wafer clamping structure under load was calculated. Using the finite element method the strength and stiffness of the elastic ring wafer clamping structure was verified. The theoretical calculation,finite element analysis and experimental measurement results show that the rigidity of the elastic ring wafer clamping structure is more than 10 kgf/um,which meets the requirements of sensor design. The research can provide technical support for the structural design of the new cantilever force sensor and micro actuator.

关键词

弹性环夹持刚度有限元强度变形

Keywords

Elastic ring clampingStiffnessFinite element methodStrengthDeformation

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