EFFECT OF RESIDUAL STRESS ON DYNAMIC PROPERTIES OF THE MICRO-MEMBRANE

WU Huayong; LIU Wenping

doi:10.16579/j.issn.1001.9669.2026.01.011

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EFFECT OF RESIDUAL STRESS ON DYNAMIC PROPERTIES OF THE MICRO-MEMBRANE

·Fatigue·Damage·Fracture·Failure Analysis· | 更新时间：2026-01-21

- EFFECT OF RESIDUAL STRESS ON DYNAMIC PROPERTIES OF THE MICRO-MEMBRANE
- Journal of Mechanical Strength Vol. 48, Issue 1, Pages: 88-92(2026)
- 作者机构：
  
  1.山东交通学院航空学院，济南 250357
  2.山东大学机械工程学院，济南 250061
- 作者简介：
  
  WU Huayong, E-mail: whyyyl@163.com
- 基金信息：
  
  Natural Science Foundation of Shandong Province(ZR2021ME211)
- DOI：10.16579/j.issn.1001.9669.2026.01.011
  CLC： TH113.1
- Received：15 April 2024，
  
  Revised：2024-06-18，
  
  Published：15 January 2026
- 稿件说明：
移动端阅览
吴化勇，刘文平. 残余应力对微膜动力学性能的影响研究［J］. 机械强度，2026，48（1）：88-92.

WU Huayong，LIU Wenping. Effect of residual stress on dynamic properties of the micro-membrane［J］. Journal of Mechanical Strength，2026，48（1）：88-92.
吴化勇，刘文平. 残余应力对微膜动力学性能的影响研究［J］. 机械强度，2026，48（1）：88-92. DOI： 10.16579/j.issn.1001.9669.2026.01.011.

WU Huayong，LIU Wenping. Effect of residual stress on dynamic properties of the micro-membrane［J］. Journal of Mechanical Strength，2026，48（1）：88-92. DOI： 10.16579/j.issn.1001.9669.2026.01.011.

摘要

目的

针对微机电薄膜中的残余应力问题，开展了具有残余应力微膜的动力学性能研究。

方法

首先，建立具有残余应力微薄板的数学模型，研究了残余应力对微膜固有频率和振型的影响规律，讨论了残余应力对板、膜行为特性转变的影响。然后，基于最小势能原理研究了具有残余应力微膜的稳定性，提出了防止微膜压曲的措施，分析了微膜在简谐激励下的振动响应。

结果

结果表明，残余应力会引起板、膜行为的转变，残余应力对固有频率影响显著，但对振型的影响较小；通过改变薄膜的结构参数和制备工艺，可有效防止薄膜失稳；残余应力对微膜固有频率和振动位移的影响呈相反的变化趋势。研究结果对微膜结构的微机电系统发展具有重要的参考意义和应用价值。

Abstract

Objective

Aiming at the residual stress problem in micro-electro-mechanical system (MEMS) films

research on the dynamic performance of micro-membrane with residual stress was conducted.

Methods

Firstly

a mathematical model of thin micro-plates with residual stress was established. The influence law of residual stress on the natural frequency and vibration mode of micro-membrane was studied

and the influence of residual stress on the transition of behavioral characteristics between plates and films was discussed. Then

the stability of micro-membrane with residual stress was studied based on the minimum potential energy principle. Measures for preventing the buckling of micro-membrane were proposed

and the vibration response of micro-membrane under harmonic excitation was analyzed.

Results

The results show that residual stress could induce the transition of behavior between plates and films; it has a significant impact on natural frequency but a slight effect on vibration mode. The instability of micro-membrane could be effectively prevented by adjusting the structural parameters and preparation process of the films. Moreover

the influences of residual stress on the natural frequency and vibration displacement of micro-membrane presented opposite variation trends. The research results have important reference significance and application value for the development of MEMS based on micro-membrane structures.

关键词

Keywords

references

彭时秋，朱赛宁 . MEMS微压压力传感器的灵敏度优化［J］. 光学精密工程， 2022 ， 30 （ 13 ）： 1582 - 1590 .

PENG Shiqiu ， ZHU Saining . Optimization of sensitivity of MEMS micro-pressure sensor ［J］. Optics and Precision Engineering ， 2022 ， 30 （ 13 ）： 1582 - 1590 . （In Chinese）

THALHOFER T ， KECK M ， KIBLER S ， et al . Capacitive sensor and alternating drive mixing for microfluidic applications using micro diaphragm pumps ［J］. Sensors ， 2022 ， 22 （ 3 ）： 1273 .

HE Y S ， WAN H T ， JIANG X N ， et al . Piezoelectric micro-machined ultrasound transducer technology：recent advances and applications ［J］. Biosensors ， 2023 ， 13 （ 1 ）： 55 .

GOEL C ， CICEK P V ， ROBICHAUD A . Design and implementation of low-voltage tunable capacitive micro-machined transducers （CMUT） for portable applications ［J］. Micromachines ， 2022 ， 13 （ 10 ）： 1598 .

BAGOLINI A ， SITAR A ， PORCELLI L ， et al . High frequency MEMS capacitive mirror for space applications ［J］. Micromachines ， 2023 ， 14 （ 1 ）： 158 .

YU Q ， FAN G X ， REN W ， et al . PZT-film-based piezoelectric micromachined ultrasonic transducer with I-shaped composite diaphragm ［J］. Micromachines ， 2022 ， 13 （ 10 ）： 1597 .

OBATA Y ， SEKINO K ， TAKEO K ， et al . Estimating residual stresses of silicon wafer from measured full-field deflection distribution ［J］. Optics and Lasers in Engineering ， 2022 ， 148 ： 106781 .

YU M ， BALACHANDRAN B . Sensor diaphragm under initial tension：linear analysis ［J］. Experimental Mechanics ， 2005 ， 45 （ 2 ）： 123 - 129 .

YU M ， LONG X H ， BALACHANDRAN B . Sensor diaphragm under initial tension：nonlinear responses and design implications ［J］. Journal of Sound and Vibration ， 2008 ， 312 （ 1/2 ）： 39 - 54 .

GE L F . Dynamic behavior of micro-diaphragms and its characterized description ［J］. Science in China Series G：Physics，Mechanics and Astronomy ， 2009 ， 52 （ 9 ）： 1345 - 1356 .

OLFATNIA M ， XU T ， ONG L S ， et al . Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms ［J］. Journal of Micromechanics and Microengineering ， 2010 ， 20 （ 1 ）： 015007 .

LEE C C ， CAO G Z ， SHEN I Y . Effects of residual stresses on lead-zirconate-titanate （PZT） thin-film membrane microactuators ［J］. Sensors and Actuators A：Physicd ， 2010 ， 159 （ 1 ）： 88 - 95 .

邱龙时，乔关林，马飞，等 . TiN薄膜的残余应力调控及力学性能研究［J］. 机械工程学报， 2017 ， 53 （ 24 ）： 42 - 48 .

QIU Longshi ， QIAO Guanlin ， MA Fei ， et al . Study on residual stress modulation and mechanical properties of titanium nitride coatings ［J］. Journal of Mechanical Engineering ， 2017 ， 53 （ 24 ）： 42 - 48 . （In Chinese）

钱劲，刘澂，张大成，等 . 微电子机械系统中的残余应力问题［J］. 机械强度， 2001 ， 23 （ 4 ）： 393 - 401 .

QIAN Jin ， LIU Cheng ， ZHANG Dacheng ， et al . Residual stresses in micro-electro-mechanical systems ［J］. Journal of Mechanical Strength ， 2001 ， 23 （ 4 ）： 393 - 401 . （In Chinese）

何建龙，安坤，杨良兴，等 . 基于MEMS超声换能器微桥结构优化［J］. 机械强度， 2021 ， 43 （ 2 ）： 482 - 487 .

HE Jianlong ， AN Kun ， YANG Liangxing ， et al . Structure optimization of microbridge based on MEMS ultrasonic transducer ［J］. Journal of Mechanical Strength ， 2021 ， 43 （ 2 ）： 482 - 487 . （In Chinese）

TIMOSHENKO S P ， WOINOWSKY-KRIEGER S . Theory of plates and shells ［M］. 2nd ed . New York ： McGraw-Hill Book Company ， 1959 ： 116 - 120 .

岑皓，王克用 . 微拉曼光谱法检测非制冷红外焦平面阵列残余应力［J］. 机械强度， 2015 ， 37 （ 1 ）： 68 - 73 .

CEN Hao ， WANG Keyong . Residual stress analysis of uncooled infrared focal plane arrays by micro-Raman spectroscopy ［J］. Journal of Mechanical Strength ， 2015 ， 37 （ 1 ）： 68 - 73 . （In Chinese）

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