In order to achieve a smaller reduction ratio and thus obtain a flexible motion space with higher motion precision

a micro-motion system composed of a two-stage reduction micro-motion mechanism without additional motion and a piezoelectric ceramic actuator was designed

and its driving performance

motion performance and dynamic performance were studied.Based on the principle of flexible hinge lever and the principle of additional motion balance

a two-stage reduction micro-motion mechanism without additional motion was designed

which could realise the precision reduction of input displacement;a piezoelectric ceramic actuator was used to drive the two-stage reduction micro-motion mechanism to form a two-stage reduction micro-motion system;the finite element method was used to complete the analysis of the system's driving performance

kinematic performance and dynamics

and the experimental method to complete the analysis of the system's driving performance and dynamics.The analysis results show that the micro-motion system drive has the advantages of high linearity

small error

etc.

the system has excellent positioning performance

the system dynamic performance is good and will not resonate in the movement process.The research has an important reference value for the design and performance analysis of the micromotion system.